Character mistake: Dr Singh refers to "a single protozoa." "Protozoa" is the plural form. He ought to have said "a single protozoan." (00:08:05)
Character mistake: In an early scene with Yvonne Hartman, she says "We've just measured the ghosts' energy at 5000 gigawatts." There are at least two mistakes here: (1) watts are a unit of power, not of energy (that would be joules); (2) later on, when Hartman is showing the Magnaclamp to the Doctor, she refers to imperial tons and says "Torchwood refuses to go metric", but a gigawatt is a metric unit.
Chosen answer: The Master knows that deep down, he deserves death for the crimes that he's committed throughout his life, and since he regards The Doctor as his arch-foe, he expects it to be at his hands. The fact that The Doctor is still willing to forgive him for all of his crimes hurts him more deeply than death would.
Captain Defenestrator